Parameter Extraction for Analytical Ion Implantation Profile Model

Abstract

Experimental data and Monte Carlo data provide data sources for constructing ion implantation profile database. We need to extract parameters for various analytical functions from the profile data. We showed that, for the expression of ion implantation profiles, there are many local minimum values sets for the third and fourth moment parameters of γ and β for the Pearson function that comprises the standard dual Pearson and tail functions. It was proposed to use a joined tail function as a mediate function to extract γ and β , and demonstrated that this enables us to extract the parameters uniquely. Other parameters associated with channeling phenomena can also be simply and uniquely extracted by the procedure.

Keywords: Ion implantation, Pearson function, dual Pearson, tail function, database, Gauss, joined half Gauss, SIMS, electron stopping power, Monte Carlo, low energy, shallow junctions, parameter extraction, B, As, joined tail function, mediate function, channeling.