MEMS in Improved Efficiency

Pp: 347-368 (22)

* (Excluding Mailing and Handling)

Abstract

Micro-Electro-Mechanical Systems or MEMS, are an achievement of this era and revolutionized the semiconductor industry. It is the amalgamation of microelectronics with micromachining technology. Though the term mechanical is one of the keywords of MEMS but not necessarily, micromachined devices should not contain mechanical parts always. Machine means cutting tools. In MEMS technology, the micron-level substrates are cut down to fabricate the device. The primary purpose of MEMS technology is miniaturization with low power consumption. The term MEMS can be described in many ways. In a single sense, MEMS is a platform on top of which some common microscopic mechanical parts, e.g., channels, holes, cantilevers, membranes, cavities, and other structures, can be fabricated. Though micromachining is associated with MEMS, still the structures are not machined. Instead, they are created using micro-fabrication technology suitable for batch processing for integrated circuits.

Keywords: Bulk micromachining, CMOS compatibility, MEMS materials, Surface micromachining.

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